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Issue Date | Title | Author(s) | Source | WOS | Fulltext/Archive link | |
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1 | 2019 | Effect of Bias Voltage on Mechanical Properties of HiPIMS/RFMS Cosputtered Zr-Si-N Films | Yung-I Chen ; Zheng, Y. Z.; Chang, L. C.; Liu, Y. H. | Materials | 2 |