第 1 到 2 筆結果,共 2 筆。
公開日期 | 標題 | 作者 | 來源出版物 | WOS | 全文 | |
---|---|---|---|---|---|---|
1 | 2022 | Effects of W Content on Structural and Mechanical Properties of TaWN Films | Chang, Li-Chun; Tzeng, Chin-Han; Chen, Yung-, I | COATINGS | 3 | |
2 | 2020 | Effects of the Nitrogen Flow Ratio and Substrate Bias on the Mechanical Properties of W-N and W-Si-N Films | Chang, Li-Chun; Sung, Ming-Ching; Chu, Li-Heng; Chen, Yung-, I | COATINGS | 4 |