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Issue Date | Title | Author(s) | Source | WOS | Fulltext/Archive link | |
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1 | 2022 | Effects of W Content on Structural and Mechanical Properties of TaWN Films | Chang, Li-Chun; Tzeng, Chin-Han; Chen, Yung-, I | COATINGS | 3 | |
2 | 2020 | Effects of the Nitrogen Flow Ratio and Substrate Bias on the Mechanical Properties of W-N and W-Si-N Films | Chang, Li-Chun; Sung, Ming-Ching; Chu, Li-Heng; Chen, Yung-, I | COATINGS | 4 |