Ammonia Gas Sensing Characteristics of an Amorphous In-Al-Zn-O (a-IAZO) Thin Film With Catalytic Platinum Nanoparticles

Abstract

A new ammonia (NH3) gas sensor synthesized by a sputtered amorphous In-Al-Zn-O (a-IAZO) and evaporated platinum (Pt) nanoparticles (NPs) is fabricated and studied. The use of Pt NPs can significantly enhance the sensing response to NH3 gas detection. Energy dispersive X-ray spectrometer (EDS), transmission electron microscopy (TEM), high-resolution scanning electron microscopy (HRSEM), atomic force microscopy (AFM), and X-ray photoelectron spectroscopy (XPS) are utilized to analyze the relevant structural, elemental, and compositional properties. The studied Pt NP/a-IAZO NH3 gas sensor exhibits a high sensing response (S-R) of 112 and a response time (recovery time) of 373 s (15 s), under 1000 ppm NH3/air gas at 300 C-degrees. The studied sensor also shows promised selectivity and long-term (90 days) stability to NH3 gas.