http://scholars.ntou.edu.tw/handle/123456789/4428
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Hsiu-Nuan Chu | en_US |
dc.contributor.author | Wu Kai | en_US |
dc.contributor.author | Yung-I Chen | en_US |
dc.date.accessioned | 2020-11-19T00:37:43Z | - |
dc.date.available | 2020-11-19T00:37:43Z | - |
dc.date.issued | 2016-12 | - |
dc.identifier.issn | 0169-4332 | - |
dc.identifier.uri | http://scholars.ntou.edu.tw/handle/123456789/4428 | - |
dc.description.abstract | A direct current magnetron cosputtering system was used to deposit Nb–Ru coatings with various chemical compositions onto silicon wafers. The Nb–Ru coatings exhibited distinct nanolaminated structures because of the cyclical gradient concentration deposition. The oxidized Nb–Ru coatings formed oxide and metal multilayers when they experienced internal oxidation at 400–600 °C in a 1% O2–99% Ar atmosphere. A two-stage parabolic-rate law was obeyed for the Nb0.49Ru0.51 coatings oxidized at 350–550 °C in 1% O2–99% Ar. The activation energies in the two-stage oxidation, dominated by oxygen dissolution and oxide formation, were calculated at 88 and 127 kJ/mol, respectively. | en_US |
dc.language.iso | en_US | en_US |
dc.publisher | Elsevier | en_US |
dc.relation.ispartof | Applied Surface Science | en_US |
dc.subject | Annealing | en_US |
dc.subject | Internal oxidation | en_US |
dc.subject | Nanolaminated structure | en_US |
dc.subject | Nb–Ru | en_US |
dc.title | Internal oxidation of laminated Nb–Ru coatings | en_US |
dc.type | journal article | en_US |
dc.identifier.doi | <Go to ISI>://WOS:000384577600058 | - |
dc.identifier.doi | <Go to ISI>://WOS:000384577600058 | - |
dc.identifier.doi | 10.1016/j.apsusc.2016.07.153 | - |
dc.identifier.doi | <Go to ISI>://WOS:000384577600058 | - |
dc.identifier.url | <Go to ISI>://WOS:000384577600058 | - |
dc.relation.journalvolume | 389 | en_US |
dc.relation.pages | 477-483 | en_US |
item.openairetype | journal article | - |
item.grantfulltext | none | - |
item.fulltext | no fulltext | - |
item.languageiso639-1 | en_US | - |
item.cerifentitytype | Publications | - |
item.openairecristype | http://purl.org/coar/resource_type/c_6501 | - |
crisitem.author.dept | College of Electrical Engineering and Computer Science | - |
crisitem.author.dept | Department of Optoelectronics and Materials Technology | - |
crisitem.author.dept | National Taiwan Ocean University,NTOU | - |
crisitem.author.dept | College of Electrical Engineering and Computer Science | - |
crisitem.author.dept | Department of Optoelectronics and Materials Technology | - |
crisitem.author.dept | National Taiwan Ocean University,NTOU | - |
crisitem.author.orcid | https://orcid.org/0000-0001-8791-7775 | - |
crisitem.author.orcid | 0000-0003-0689-5709 | - |
crisitem.author.parentorg | National Taiwan Ocean University,NTOU | - |
crisitem.author.parentorg | College of Electrical Engineering and Computer Science | - |
crisitem.author.parentorg | National Taiwan Ocean University,NTOU | - |
crisitem.author.parentorg | College of Electrical Engineering and Computer Science | - |
Appears in Collections: | 光電與材料科技學系 |
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