http://scholars.ntou.edu.tw/handle/123456789/7578| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Chung-Cheng Chang | en_US |
| dc.contributor.author | Tang, C. S. | en_US |
| dc.date.accessioned | 2020-11-20T07:59:28Z | - |
| dc.date.available | 2020-11-20T07:59:28Z | - |
| dc.date.issued | 1998-03-15 | - |
| dc.identifier.issn | 0924-4247 | - |
| dc.identifier.uri | http://scholars.ntou.edu.tw/handle/123456789/7578 | - |
| dc.description.abstract | In this paper integrated pyroelectric infrared sensors have been made by combining a (Pb(Zr52Ti48)O3, PZT) thin film with an Si JFET. The JFET is used to read out the pyroelectrically generated signal. The relevant sensor parameters, voltage sensitivity and specific detectivity, are measured within a modulation frequency range from 0.2 to 10 Hz. With a 500 μm thick silicon substrate, the voltage sensitivity is Rv = 191 V W−1 and the maximum specific detectivity is D*=2 × 107 cm Hz1/2 W−1 at a modulation frequency of 1 Hz. | en_US |
| dc.language.iso | en | en_US |
| dc.publisher | ELSEVIER | en_US |
| dc.relation.ispartof | Sensors and Actuators a-Physical | en_US |
| dc.subject | Pyroelectric | en_US |
| dc.subject | Lead zirconate titanate (PZT) | en_US |
| dc.subject | Infrared sensors | en_US |
| dc.subject | JFET | en_US |
| dc.subject | Thin films | en_US |
| dc.subject | Voltage sensitivity | en_US |
| dc.subject | Specific detectivity | en_US |
| dc.title | An integrated pyroelectric infrared sensor with a PZT thin film | en_US |
| dc.type | journal article | en_US |
| dc.identifier.doi | <Go to ISI>://WOS:000072666000013 | - |
| dc.identifier.doi | <Go to ISI>://WOS:000072666000013 | - |
| dc.identifier.doi | <Go to ISI>://WOS:000072666000013 | - |
| dc.identifier.doi | 10.1016/s0924-4247(97)01663-4 | - |
| dc.identifier.doi | <Go to ISI>://WOS:000072666000013 | - |
| dc.identifier.doi | <Go to ISI>://WOS:000072666000013 | - |
| dc.identifier.url | <Go to ISI>://WOS:000072666000013 | |
| dc.relation.journalvolume | 65 | en_US |
| dc.relation.journalissue | 2-3 | en_US |
| dc.relation.pages | 171-174 | en_US |
| item.cerifentitytype | Publications | - |
| item.openairetype | journal article | - |
| item.openairecristype | http://purl.org/coar/resource_type/c_6501 | - |
| item.fulltext | no fulltext | - |
| item.grantfulltext | none | - |
| item.languageiso639-1 | en | - |
| crisitem.author.dept | College of Electrical Engineering and Computer Science | - |
| crisitem.author.dept | Department of Electrical Engineering | - |
| crisitem.author.dept | National Taiwan Ocean University,NTOU | - |
| crisitem.author.dept | Center of Excellence for Ocean Engineering | - |
| crisitem.author.dept | Data Analysis and Administrative Support | - |
| crisitem.author.orcid | 0000-0002-8560-6030 | - |
| crisitem.author.parentorg | National Taiwan Ocean University,NTOU | - |
| crisitem.author.parentorg | College of Electrical Engineering and Computer Science | - |
| crisitem.author.parentorg | National Taiwan Ocean University,NTOU | - |
| crisitem.author.parentorg | Center of Excellence for Ocean Engineering | - |
| Appears in Collections: | 電機工程學系 | |
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