http://scholars.ntou.edu.tw/handle/123456789/8531| DC 欄位 | 值 | 語言 |
|---|---|---|
| dc.contributor.author | Mu-Der Jeng | en_US |
| dc.contributor.author | Zhou, M. C. | en_US |
| dc.contributor.author | Chen, T. W. Y. | en_US |
| dc.date.accessioned | 2020-11-20T11:06:23Z | - |
| dc.date.available | 2020-11-20T11:06:23Z | - |
| dc.date.issued | 2004-09 | - |
| dc.identifier.issn | 1070-9932 | - |
| dc.identifier.uri | http://scholars.ntou.edu.tw/handle/123456789/8531 | - |
| dc.relation.ispartof | Ieee Robotics & Automation Magazine | en_US |
| dc.title | Recent advances in semiconductor factory automation, part 2: Equipment-level automation | en_US |
| dc.type | journal article | en_US |
| dc.identifier.doi | <Go to ISI>://WOS:000224038300002 | - |
| dc.identifier.url | <Go to ISI>://WOS:000224038300002 | |
| dc.relation.journalvolume | 11 | en_US |
| dc.relation.journalissue | 3 | en_US |
| item.cerifentitytype | Publications | - |
| item.openairetype | journal article | - |
| item.openairecristype | http://purl.org/coar/resource_type/c_6501 | - |
| item.fulltext | no fulltext | - |
| item.grantfulltext | none | - |
| crisitem.author.dept | College of Electrical Engineering and Computer Science | - |
| crisitem.author.dept | Department of Electrical Engineering | - |
| crisitem.author.dept | National Taiwan Ocean University,NTOU | - |
| crisitem.author.parentorg | National Taiwan Ocean University,NTOU | - |
| crisitem.author.parentorg | College of Electrical Engineering and Computer Science | - |
| 顯示於： | 電機工程學系 | |
在 IR 系統中的文件，除了特別指名其著作權條款之外，均受到著作權保護，並且保留所有的權利。
