| 公開日期 | 標題 | 作者 | 來源出版物 | scopus | WOS | 全文 |
|---|---|---|---|---|---|---|
| 1996 | Computer simulations for mask structure heating in X-ray lithography | Li, D. C.; Jeng-Tzong Chen ; Chyuan, S. W.; Sun, C. Y. | Computers & Structures | |||
| 1995 | THERMOMECHANICAL RESPONSE ANALYSIS OF LITHOGRAPHIC MASK STRUCTURE USING FINITE-ELEMENT METHOD | Li, D. C.; Chyuan, S. W.; Jeng-Tzong Chen ; Sun, C. Y. | Jsme International Journal Series a-Mechanics and Material Engineering |
