公開日期 | 標題 | 作者 | 來源出版物 | WOS | 全文 |
2021 | Effects of bias voltage and substrate temperature on the mechanical properties and oxidation behavior of CrSiN films | Chang, Li-Chun; Sung, Ming-Ching; Chen, Yung-, I | VACUUM | 4 | |
2020 | Effects of the Nitrogen Flow Ratio and Substrate Bias on the Mechanical Properties of W-N and W-Si-N Films | Chang, Li-Chun; Sung, Ming-Ching; Chu, Li-Heng; Chen, Yung-, I | COATINGS | 4 | |
2022 | Mechanical properties and oxidation behavior of CrWSiN films | Chang, Li-Chun; Sung, Ming-Ching; Chen, Yung-I ; Tseng, Chin-Han | SURF COAT TECH | 1 | |