Oxidational Characteristics and Mechanical Properties of Cnx-Deposited Cemented Wc with Thermal Barrier Interlayers Built by Sol-Gel Process under High Temperatures

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Project title

Code/計畫編號

NSC102-2221-E019-011

Translated Name/計畫中文名

溶膠凝膠法製作熱屏障中間層運用於被覆含氮類鑽碳薄膜之燒結碳化鎢的高溫氧化特性與機械性質

Project Coordinator/計畫主持人

Chau-Chang Chou

Funding Organization/主管機關

National Science and Technology Council

Department/Unit

Department of Mechanical and Mechatronic Engineering

Website

https://www.grb.gov.tw/search/planDetail?id=3113450

Year

2013

Start date/計畫起

01-08-2013

Expected Completion/計畫迄

01-07-2014

Bugetid/研究經費

908千元

ResearchField/研究領域

機械工程
材料科技

"本計畫研究具有耐熱屛障中間層之燒結碳化鎢底材上被覆含氮碳膜的機械性質與氧化特性，其中間層係利用溶膠 -凝膠製成之浸漬覆膜方法分別製作 Mullite (3Al2O3·2SiO2)和 Al2O3+TiO2 複合膜而成，是具有高溫抗氧化能力的熱屏障層，最外層的含氮碳膜則是以射頻電漿輔助化學氣相沉積系統調整 CH4 與 N2 比例，以及工作壓力製備。實驗對象分成原始鍍膜試片，以及經過在低氧分壓氣氛下進行不同持溫溫度與不同循環周次之高溫氧化試片。透過表面輪廓儀與橢圓儀量測其膜厚，拉曼光譜儀、X 光繞射儀、傅立葉轉換紅外線光譜儀與 X 光光電子能譜儀分析在不同參數與不同加熱條件下之薄膜結構、官能基與元素之變化。由奈米壓痕試驗、刮痕實驗和磨耗實驗，比較不同氧化溫度與熱循環周次的薄膜硬度、結合強度以及摩擦係數。耐熱屛障中間層與碳化鎢底材，及外層之含氮碳膜的綜合性能與界面材質關係，是本計畫的探討重點。希望能透過國際合作的方式，研究並提供改善碳化鎢光學玻璃壓鑄模具的最佳製程方法。" "Carbon nitride films (CNx films) are to be deposited on WC-Co substrates by radio frequency plasma enhanced chemical vapor deposition (RF-PECVD), using a CH4/N2 mixture and various pressures. Two duplex interlayers, Mullite (3Al2O3·2SiO2) and Al2O3+TiO2, are to be coated by dip coating and the related sol-gel process as thermal barriers coatings (TBCs) with oxidation resistance under high temperature. High temperature annealing tests, under various constant temperatures and cyclic thermal processes, are to be conducted in a 50 ppm O2-N2 atmosphere. The films’ thicknesses are to be measured by a surface nano-profiler and an ellipseometer. Layers’ microstructures, morphologies and composition of the resulting films will be analyzed by means of atomic force microscopy (AFM), Raman spectroscopy, X-ray diffraction, X-ray photoelectron spectroscopy (XPS), and Fourier transformation inferred spectroscopy (FTIR). The mechanical properties of coatings will be examined by nano-indentation, nano-scratch test, and pin-on-disk wear test. The anti-oxidation capability and toughness of the CNx/TBCs/WC-Co combinations are to be studied partially with the collaboration of international joint research, which is hopefully to be an industrial breakthrough in the future."

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Oxidational Characteristics and Mechanical Properties of Cnx-Deposited Cemented Wc with Thermal Barrier Interlayers Built by Sol-Gel Process under High Temperatures

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