Sol-Gel Built Thermal Barrier Interlayers on the Antioxidation and Adhesion of Two Substrates with Dlcs Outmost Layers

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基本資料

Project title

Code/計畫編號

MOST103-2221-E019-003

Translated Name/計畫中文名

溶膠凝膠法製作之熱屏障中間層於具有類鑽碳表層之兩種底材的抗氧化性與結合性

Project Coordinator/計畫主持人

Chau-Chang Chou

Funding Organization/主管機關

National Science and Technology Council

Department/Unit

Department of Mechanical and Mechatronic Engineering

Website

https://www.grb.gov.tw/search/planDetail?id=8309477

Year

2014

Start date/計畫起

01-08-2014

Expected Completion/計畫迄

01-07-2015

Bugetid/研究經費

758千元

ResearchField/研究領域

機械工程
材料科技

"本計畫研究具有耐熱屛障中間層之燒結碳化鎢與鈦合金底材上被覆類鑽碳薄膜的抗氧化特性與結合強度，其中間層係利用溶膠-凝膠製程之浸漬覆膜方法分別製作不同比例之 Al2O3 和 SiO2 非晶質複合膜而成，是具有抗氧化能力的熱屏障層，最外層的功能性類鑽碳膜，則是以射頻電漿輔助化學氣相沉積系統調整 CH4 與 N2 或 CF4 比例以及工作壓力製備。實驗對象分成原始鍍膜試片，以及分別經過在空氣中以不同持溫溫度氧化試片。透過表面輪廓儀與橢圓儀量測其膜厚，以電子顯微鏡(SEM 和 FIB-TEM)、拉曼光譜儀、X 光繞射儀、傅立葉轉換紅外線光譜儀與 X 光光電子能譜儀分析在不同參數與不同加熱條件下之薄膜結構、官能基與元素之變化。由奈米壓痕試驗和刮痕實驗，比較不同氧化溫度的薄膜硬度、結合強度以及摩擦係數。耐熱屛障中間層與兩種底材，及外層之類鑽碳膜的綜合性能與界面材質關係，是本計畫的探討重點。希望能透過國際合作的方式，研究並提供改善這兩種材料在光學玻璃模具以及生醫植入物之運用時的最佳製程方法。" "Functional diamond like carbon films (DLCs films) are to be deposited on WC-Co and Ti6Al4V substrates by radio frequency plasma enhanced chemical vapor deposition (RF-PECVD), using CH4/N2 (for WC-Co) or CH4/CF4 (for Ti6V4V) mixtures under various pressures. Composites interlayers, majorly combinations of amorphous Al2O3 and SiO2, are to be coated by dip coating and the related sol-gel process as thermal barriers coatings (TBCs) with oxidation resistance. High temperature annealing tests, under various constant temperatures, are to be conducted in air. The films’ thicknesses are to be measured by a surface nano-profiler and an ellipseometer. Layers’ microstructures, morphologies and composition of the resulting films will be analyzed by means of electron microscopies (SEM and FIB-TEM), atomic force microscopy, Raman spectroscopy, X-ray diffraction, X-ray photoelectron spectroscopy, and Fourier transformation inferred spectroscopy. The mechanical properties of coatings will be examined by nano-indentation and nano-scratch test. The anti-oxidation capability and toughness of the CNx/TBCs/WC-Co and F-DLC/TBCs/Ti6Al4V combinations are to be studied partially with the collaboration of international joint research, which is hopefully to be an industrial breakthrough in the future."

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Sol-Gel Built Thermal Barrier Interlayers on the Antioxidation and Adhesion of Two Substrates with Dlcs Outmost Layers

基本資料

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