http://scholars.ntou.edu.tw/handle/123456789/15958| Title: | High resolution angular measurement using surface-plasmon-resonance heterodyne interferometry at optimal incident wavelengths | Authors: | Hai-Pang Chiang Jing-Lun Lin Railing Chang Zhi-Wei Chen Pui Tak Leung |
Issue Date: | 10-Nov-2005 | Publisher: | Society of Photo-Optical Instrumentation Engineers (SPIE) | Journal Volume: | 6002 | Start page/Pages: | 600218 | Source: | Nanofabrication: Technologies, Devices, and Applications II | Abstract: | We have recently demonstrated that ultra high resolution of angular measurement down to 10-6 degree can be achieved via surface-plasmon-resonance heterodyne interferometry, in which the phase difference between p- and s- polarized reflected waves is monitored as a function of the incident angle. Here we give a brief summary of this technique and the rationale based on which such a measurement is possible. As a further study, we have also investigated, via simulation, how the change in environmental temperature will affect the resolution limit of this very versatile technique. |
URI: | http://scholars.ntou.edu.tw/handle/123456789/15958 | DOI: | 10.1117/12.630594 |
| Appears in Collections: | 光電與材料科技學系 |
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