Growth and Structural Characterization of SiGe Nanorings

Abstract

Self-assembled single-crystalline Si(1-x)Ge(x) nanorings (NRs), as small as 10 nm with narrow distributions of height and diameter, have been fabricated without any specific equipment. Compared to other approaches for nanofabricating the ring-like structures, the smallest Si(1-x)Ge(x) NRs with the highest density were obtained by the mediation of Au nanodots. The process promises the availability of Si(1-x)Ge(x) NRs with a wide range of Ge concentration and size, and can serve as a useful platform for the fundamental understanding and future practical applications of NR devices.