http://scholars.ntou.edu.tw/handle/123456789/2605| 標題: | Mechanical Properties of Zr-Si-N Films Fabricated through HiPIMS/RFMS Co-Sputtering | 作者: | Chang, L. C. Zheng, Y. Z. Yung-I Chen |
公開日期: | 八月-2018 | 卷: | 8 | 期: | 8 | 來源出版物: | Coatings | URI: | http://scholars.ntou.edu.tw/handle/123456789/2605 | ISSN: | 2079-6412 | DOI: | 10.3390/coatings8080263 |
| 顯示於： | 光電與材料科技學系 |
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