Generally applicable self-masked dry etching technique for nanotip array fabrication

Please use this identifier to cite or link to this item: http://scholars.ntou.edu.tw/handle/123456789/4522

Title:	Generally applicable self-masked dry etching technique for nanotip array fabrication
Authors:	Hsu, C. H. Lo, H. C. Chen, C. F. Wu, C. T. Jih-Shang Hwang Das, D. Tsai, J. Chen, L. C. Chen, K. H.
Issue Date:	Mar-2004
Journal Volume:	4
Journal Issue:	3
Source:	Nano Letters
URI:	http://scholars.ntou.edu.tw/handle/123456789/4522
ISSN:	1530-6984
DOI:	10.1021/nl049925t ://WOS:000220170600017
Appears in Collections:	光電與材料科技學系

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