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  1. National Taiwan Ocean University Research Hub
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  3. 電機工程學系
請用此 Handle URI 來引用此文件: http://scholars.ntou.edu.tw/handle/123456789/7577
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dc.contributor.authorChung-Cheng Changen_US
dc.contributor.authorLee, C. H.en_US
dc.date.accessioned2020-11-20T07:59:28Z-
dc.date.available2020-11-20T07:59:28Z-
dc.date.issued2000-10-
dc.identifier.issn0018-9383-
dc.identifier.urihttp://scholars.ntou.edu.tw/handle/123456789/7577-
dc.description.abstractIn this experiment, the PIN photodiode by using ZnSe/porous Si/Si structure was investigated. The single crystal ZnSe epilayer is successfully grown on porous silicon substrate with CVD system. Indium is as a dopant to reduce the resistivity of ZnSe intrinsic layer. To control the different thickness of n-ZnSe layer will change the photocurrent and responsivity of the ZnSe PIN diode. The best diffusion conditions are diffusion temperature of 300/spl deg/C and driving time of 30 min. The responsivity of device is 0.03 A/W. In addition, the dark current of the photodiode is near zero.en_US
dc.language.isoenen_US
dc.publisherIEEEen_US
dc.relation.ispartofIeee Transactions on Electron Devicesen_US
dc.subjectp-i-n photodiodesen_US
dc.titleStudy and fabrication of PIN photodiode by using ZnSe/PS/Si structureen_US
dc.typejournal articleen_US
dc.identifier.doi10.1109/16.817566-
dc.identifier.doi<Go to ISI>://WOS:000084717800006-
dc.identifier.doi<Go to ISI>://WOS:000084717800006-
dc.identifier.url<Go to ISI>://WOS:000084717800006
dc.relation.journalvolume47en_US
dc.relation.journalissue1en_US
dc.relation.pages50-54en_US
item.openairecristypehttp://purl.org/coar/resource_type/c_6501-
item.cerifentitytypePublications-
item.languageiso639-1en-
item.fulltextno fulltext-
item.grantfulltextnone-
item.openairetypejournal article-
crisitem.author.deptCollege of Electrical Engineering and Computer Science-
crisitem.author.deptDepartment of Electrical Engineering-
crisitem.author.deptNational Taiwan Ocean University,NTOU-
crisitem.author.deptCenter of Excellence for Ocean Engineering-
crisitem.author.deptData Analysis and Administrative Support-
crisitem.author.orcid0000-0002-8560-6030-
crisitem.author.parentorgNational Taiwan Ocean University,NTOU-
crisitem.author.parentorgCollege of Electrical Engineering and Computer Science-
crisitem.author.parentorgNational Taiwan Ocean University,NTOU-
crisitem.author.parentorgCenter of Excellence for Ocean Engineering-
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