http://scholars.ntou.edu.tw/handle/123456789/8561| DC 欄位 | 值 | 語言 |
|---|---|---|
| dc.contributor.author | Wen, Y. L. | en_US |
| dc.contributor.author | Mu-Der Jeng | en_US |
| dc.contributor.author | Huang, Y. S. | en_US |
| dc.date.accessioned | 2020-11-20T11:06:26Z | - |
| dc.date.available | 2020-11-20T11:06:26Z | - |
| dc.date.issued | 2006 | - |
| dc.identifier.issn | 0-87849-990-3 | - |
| dc.identifier.uri | http://scholars.ntou.edu.tw/handle/123456789/8561 | - |
| dc.relation.ispartof | Progress on Advanced Manufacture for Micro/Nano Technology 2005, Pt 1 and 2 | en_US |
| dc.title | Diagnosability of semiconductor manufacturing equipment | en_US |
| dc.type | book chapter | en_US |
| dc.identifier.doi | 10.4028/www.scientific.net/MSF.505-507.1135 | - |
| dc.identifier.doi | <Go to ISI>://WOS:000235279200190 | - |
| dc.identifier.doi | <Go to ISI>://WOS:000235279200190 | - |
| dc.identifier.url | <Go to ISI>://WOS:000235279200190 | |
| dc.relation.journalvolume | 505-507 | en_US |
| item.openairetype | book chapter | - |
| item.fulltext | no fulltext | - |
| item.openairecristype | http://purl.org/coar/resource_type/c_18cf | - |
| item.grantfulltext | none | - |
| item.cerifentitytype | Publications | - |
| crisitem.author.dept | College of Electrical Engineering and Computer Science | - |
| crisitem.author.dept | Department of Electrical Engineering | - |
| crisitem.author.dept | National Taiwan Ocean University,NTOU | - |
| crisitem.author.parentorg | National Taiwan Ocean University,NTOU | - |
| crisitem.author.parentorg | College of Electrical Engineering and Computer Science | - |
| 顯示於： | 電機工程學系 | |
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