Fabrication of Metallic Nanohole Arrays and Study on Its Optical Properties( I )

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Project title

Code/計畫編號

MOST109-2112-M019-001

Translated Name/計畫中文名

金屬奈米孔洞陣列的製作與其光學性質之研究-金屬奈米孔洞陣列的製作與其光學性質之研究(1/3)

Project Coordinator/計畫主持人

Hai-Pang Chiang

Funding Organization/主管機關

National Science and Technology Council

Co-Investigator(s)/共同執行人

張瑞麟
賴志賢
高宗聖
黃鴻基
施閔雄
廖駿偉

Department/Unit

Department of Optoelectronics and Materials Technology

Website

https://www.grb.gov.tw/search/planDetail?id=13539837

Year

2020

Start date/計畫起

01-08-2020

Expected Completion/計畫迄

31-07-2021

Bugetid/研究經費

2220千元

ResearchField/研究領域

物理

Since the phenomenon of extraordinary optical transmission has been observed in the metallic nanohole arrays, many basic research and applications based on this nano-structures have been extended violently. Recently sandwiched plasmonic ruler based on gold nanohole array and gold nano-flim has been reported. This nano-structure is composed of metal-insulator-metal elements and its ultra-high sensitivity is coming from the effect of vertical plasmonic coupling between metal layers. Many results about biosensing and surface enhanced Raman scattering by using this nano-structure have been reported. In our recent published paper of near infrared surface enhanced Raman scattering, we found that stronger plasmonic coupling and hence larger local electric field enhancement will happen if the metallic nano-structures are placed on the hyperbolic metamaterials, rather than the metallic nano-structures placed on silver film. This discovery lead to the research motivation of the three-project. Based on our experimental and theoretical accomplishments at the research topic of surface plasmon resonance biosensing, surface enhanced Raman scattering (SERS), metal enhanced fluorescence and plasmonic photo-catalysis in the past few years, our research team proposes to fabricate metallic nanohole arrays by using nanosphere lithography and focus ion beam lithography. Since hyperbolic metamaterials (HMM) is a multi-function platform, we will further theoretically and experimentally fabricate metallic nanohole arrays on the substrate of hyperbolic metamaterials. These metallic nanohole arrays can be employed in the experimental research of localized surface plasmon resonance (LSPR) biosensing, plasmonic photo-catalysis, SERS and metal-enhanced fluorescence. In the first year of this project, we will focus on the fabrication of metallic nanohole arrays with the help of collaborating partners in NTU, Academia Sinica, and RCAS. We will also perform localized SPR biosensing by using these nanostructures. In the second year of this project, we will perform experimental research of SERS and plasmonic photo-catalysis based on metallic nanohole arrays. Since the modes of HMM can be tuned by changing the combination of metals and dielectrics, we will also perform the experiment of SERS with multi-wavelength excitation. In the third year of this project, metal-enhanced fluorescence and life-time shortening of fluorescent materials combined with metallic nanohole arrays will be studied by using PL and time-resolved PL systems. We believe the research results of this three-year project will bring a whole-through understanding of the nano-structures of metallic nanohole arrays. 自從金屬週期性奈米孔洞陣列異常的光學穿透現象被發現以後，許多以此奈米結構為基礎的應用與研究便熱烈的展開。最近有人開發了以金奈米孔陣列與金奈米薄膜為基礎的夾層型電漿標尺，這種以金屬-介電質¬-金屬為基礎的奈米結構，具有由電漿子垂直耦合效應所引起的超高靈敏度，在生物感測、表面增強拉曼散射等研究領域都有許多成果報導。最近從我們在近紅外表面增強拉曼散射的研究成果可以發現，奈米結構放置於雙曲超穎材料上比放置於單純銀膜，會產生更強的電漿子耦合效應，進而產生局域的電場增強，此結果引起此計畫的研究動機。基於過去幾年在表面電漿共振生物感測、表面增強拉曼散射、金屬增強螢光、電漿子光觸媒的理論與實驗上的研究經驗與成果，我們的研究團隊計畫擬利用奈米球微影術及聚焦離子束蝕刻來製作金屬奈米孔洞陣列，由於雙曲超穎材料是個多功能平台，我們將進一步進行理論和實驗研究如何將金屬奈米孔洞陣列結構製作在雙曲超穎材料上，以進行侷域表面電漿共振生物感測、電漿子光觸媒、表面增強拉曼散射光譜以及金屬增強螢光的實驗研究，相信此計畫三年後的研究成果，將可以對於這些金屬奈米孔洞陣列相關光學特性有通盤的了解，並對這些領域帶來新的契機。

Keyword(s)

金屬奈米孔洞陣列
雙曲超穎材料
表面電漿共振
生物感測
表面增強拉曼散射
金屬增強螢光
電漿子光觸媒
metallic nanohole arrays
hyperbolic metamaterials
surface plasmon resonance
biosensing
surface enhanced Raman scattering
Raman scattering
metal-enhanced fluorescence
plasmonic photo-catalysis

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Fabrication of Metallic Nanohole Arrays and Study on Its Optical Properties( I )

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