第 1 到 1 筆結果,共 1 筆。
公開日期 | 標題 | 作者 | 來源出版物 | WOS | 全文 | |
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1 | 2010 | A TEM investigation of retained defects in Si wafer by 1 MeV Si ions bombardment | Hsu, J. Y.; Rong-Tan Huang ; Hung, M. J.; Yu, Y. C. | Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms |