http://scholars.ntou.edu.tw/handle/123456789/1863
標題: | Sub-wavelength GaN-based membrane high contrast grating reflectors | 作者: | Tzeng Tsong Wu Yu Cheng Syu Shu Hsien Wu Wei Ting Chen Tien Chang Lu Shing Chung Wang Hai Pang Chiang Din Ping Tsai |
公開日期: | 27-八月-2012 | 出版社: | Optical Society of America | 卷: | 20 | 期: | 18 | 起(迄)頁: | 20551-20557 | 來源出版物: | Optics Express | 摘要: | The GaN-based membrane high contrast grating (HCG) reflectors have been fabricated and investigated. The structural parameters including grating periods, grating height, filling factors and air-gap height were calculated to realize high reflectivity spectra with broad bandwidth by the rigorous coupled-wave analysis and finite-difference time-domain method. Based on the optimized simulation results, the GaN-based membrane HCGs were fabricated by e-beam lithography and focused-ion beam process. The fabricated GaN-based membrane HCG reflectors revealed high reflectivity at 460 nm band with large stopband width of 60 nm in the TE polarization measured by using the micro-reflectivity spectrometer. The experimental results also showed a good agreement with simulated ones. We believe this study will be helpful for development of the GaN-based novel light emitting devices in the blue or UV region. |
URI: | http://scholars.ntou.edu.tw/handle/123456789/1863 | ISSN: | 1094-4087 | DOI: | 10.1364/oe.20.020551 |
顯示於: | 光電與材料科技學系 |
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