Deep and Alignment Free Patterned Etching of GaN Surface Using an Atomic Force Microscope

請用此 Handle URI 來引用此文件： http://scholars.ntou.edu.tw/handle/123456789/2008

標題:	Deep and Alignment Free Patterned Etching of GaN Surface Using an Atomic Force Microscope
作者:	Chen, D. C. Chen, L. W. Hu, Z. S. You, Z. Y. Wu, C. C. Tai-Yuan Lin Chattopadhyay, S. Jih-Shang Hwang Tsong-Ru Tsai
公開日期:	五月-2011
卷:	11
期:	5
來源出版物:	Journal of Nanoscience and Nanotechnology
URI:	http://scholars.ntou.edu.tw/handle/123456789/2008
ISSN:	1533-4880
DOI:	10.1166/jnn.2011.3859 ://WOS:000290692400033
顯示於：	光電與材料科技學系