http://scholars.ntou.edu.tw/handle/123456789/23612
標題: | Effects of nitrogen flow ratio on the structural, mechanical, and anticorrosive properties of co-sputtered (NbTaMoW)Nx films |
作者: | Lee, Jyh-Wei Chen, Chun-Yen Chen, Yi-Jyun Tzeng, Chin-Han Chen, Yung-, I |
關鍵字: | Corrosion resistance;High-entropy alloys;Mechanical properties;Medium-entropy alloys;Transition metal nitride films;Phase transformation |
公開日期: | 1-十一月-2022 |
出版社: | ELSEVIER |
卷: | 21 |
起(迄)頁: | 1890-1902 |
來源出版物: | JOURNAL OF MATERIALS RESEARCH AND TECHNOLOGY-JMR&T |
摘要: | In this study (NbTaMoW)Nx films were fabricated through reactive co-sputtering using four pure-element targets at various nitrogen flow ratios (RN2). It was also explored the phase structures, mechanical properties, and corrosion resistance properties of these films. The results indicated that the stoichiometric ratio x of the (NbTaMoW)Nx films increased with increasing RN2, accompanied by body-ce... |
URI: | http://scholars.ntou.edu.tw/handle/123456789/23612 |
ISSN: | 2238-7854 |
DOI: | 10.1016/j.jmrt.2022.10.033 |
顯示於: | 光電與材料科技學系 |
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