http://scholars.ntou.edu.tw/handle/123456789/2515| Title: | Computer simulations for mask structure heating in X-ray lithography | Authors: | Li, D. C. Jeng-Tzong Chen Chyuan, S. W. Sun, C. Y. |
Issue Date: | Feb-1996 | Journal Volume: | 58 | Journal Issue: | 4 | Source: | Computers & Structures | URI: | http://scholars.ntou.edu.tw/handle/123456789/2515 | ISSN: | 0045-7949 | DOI: | 10.1016/0045-7949(95)00063-m |
| Appears in Collections: | 河海工程學系 |
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