Mechanical properties and oxidation resistance of reactively sputtered Ta-1 (-) xZrxNy thin films

Please use this identifier to cite or link to this item: http://scholars.ntou.edu.tw/handle/123456789/2599

Title:	Mechanical properties and oxidation resistance of reactively sputtered Ta-1 (-) xZrxNy thin films
Authors:	Chang, L. C. Chang, C. Y. Yung-I Chen
Issue Date:	Oct-2015
Journal Volume:	280
Source:	Surface & Coatings Technology
URI:	http://scholars.ntou.edu.tw/handle/123456789/2599
ISSN:	0257-8972
DOI:	10.1016/j.surfcoat.2015.08.051 ://WOS:000363825100004
Appears in Collections:	光電與材料科技學系

Show full item record

checked on Mar 18, 2021

Last Week
0

Last month
0

checked on Oct 13, 2022

Check

DSpace CRIS