Mechanical Properties of Zr-Si-N Films Fabricated through HiPIMS/RFMS Co-Sputtering

Please use this identifier to cite or link to this item: http://scholars.ntou.edu.tw/handle/123456789/2605

Title:	Mechanical Properties of Zr-Si-N Films Fabricated through HiPIMS/RFMS Co-Sputtering
Authors:	Chang, L. C. Zheng, Y. Z. Yung-I Chen
Issue Date:	Aug-2018
Journal Volume:	8
Journal Issue:	8
Source:	Coatings
URI:	http://scholars.ntou.edu.tw/handle/123456789/2605
ISSN:	2079-6412
DOI:	10.3390/coatings8080263 ://WOS:000443252300008
Appears in Collections:	光電與材料科技學系

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