Sub-micron-structure machining on silicon by femtosecond laser

Please use this identifier to cite or link to this item: http://scholars.ntou.edu.tw/handle/123456789/3072

Title:	Sub-micron-structure machining on silicon by femtosecond laser
Authors:	Tsai, H. Y. Luo, S. W. Wu, C. W. Shing-Hoa Wang
Issue Date:	Sep-2009
Journal Volume:	19
Source:	Transactions of Nonferrous Metals Society of China
URI:	http://scholars.ntou.edu.tw/handle/123456789/3072
ISSN:	1003-6326
DOI:	10.1016/s1003-6326(10)60266-x ://WOS:000270377800031
Appears in Collections:	機械與機電工程學系

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