Thermal stability of CrTaN hard coatings prepared using biased direct current sputter deposition

Please use this identifier to cite or link to this item: http://scholars.ntou.edu.tw/handle/123456789/3165

Title:	Thermal stability of CrTaN hard coatings prepared using biased direct current sputter deposition
Authors:	Lin, K. Y. Chau-Chang Chou Yung-I Chen
Issue Date:	Oct-2013
Journal Volume:	544
Source:	Thin Solid Films
URI:	http://scholars.ntou.edu.tw/handle/123456789/3165
ISSN:	0040-6090
DOI:	10.1016/j.tsf.2012.11.047
Appears in Collections:	機械與機電工程學系

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