http://scholars.ntou.edu.tw/handle/123456789/3461| Title: | Dynamically adjustable three-dimensional gray masks operated by electrostatic force modulation for the fabrication of microlens arrays in microchannels | Authors: | Shih-Hao Huang Yu, Z. Y. Lin, C. K. Hung, K. Y. |
Issue Date: | Oct-2010 | Journal Volume: | 9 | Journal Issue: | 4 | Source: | Journal of Micro-Nanolithography Mems and Moems | URI: | http://scholars.ntou.edu.tw/handle/123456789/3461 | ISSN: | 1932-5150 | DOI: | 10.1117/1.3497586 |
| Appears in Collections: | 機械與機電工程學系 |
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