http://scholars.ntou.edu.tw/handle/123456789/6152
Title: | Influence of Ar/O-2 ratio on the electrical properties of metal-ferroelectric (BiFeO3)-insulator (HfO2)-semiconductor capacitors fabricated by rf magnetron sputtering | Authors: | Juan, T. P. C. Lu, J. H. Ming-Wei Lu |
Issue Date: | Jan-2009 | Journal Volume: | 27 | Journal Issue: | 1 | Source: | Journal of Vacuum Science & Technology B | URI: | http://scholars.ntou.edu.tw/handle/123456789/6152 | ISSN: | 2166-2746 | DOI: | 10.1116/1.3021025 |
Appears in Collections: | 水產養殖學系 |
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