http://scholars.ntou.edu.tw/handle/123456789/8543
Title: | Modeling and analysis of semiconductor manufacturing systems with degraded behavior using Petri nets and siphons | Authors: | Mu-Der Jeng Xie, X. L. |
Issue Date: | Oct-2001 | Journal Volume: | 17 | Journal Issue: | 5 | Source: | Ieee Transactions on Robotics and Automation | URI: | http://scholars.ntou.edu.tw/handle/123456789/8543 | ISSN: | 1042-296X | DOI: | 10.1109/70.964659 |
Appears in Collections: | 電機工程學系 |
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