http://scholars.ntou.edu.tw/handle/123456789/8566| Title: | Modeling, analysis, simulation, scheduling, and control of semiconductor manufacturing systems: A Petri net approach | Authors: | Zhou, M. C. Mu-Der Jeng |
Issue Date: | Aug-1998 | Journal Volume: | 11 | Journal Issue: | 3 | Source: | Ieee Transactions on Semiconductor Manufacturing | URI: | http://scholars.ntou.edu.tw/handle/123456789/8566 | ISSN: | 0894-6507 | DOI: | 10.1109/66.705370 |
| Appears in Collections: | 電機工程學系 |
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