http://scholars.ntou.edu.tw/handle/123456789/8566| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Zhou, M. C. | en_US |
| dc.contributor.author | Mu-Der Jeng | en_US |
| dc.date.accessioned | 2020-11-20T11:06:27Z | - |
| dc.date.available | 2020-11-20T11:06:27Z | - |
| dc.date.issued | 1998-08 | - |
| dc.identifier.issn | 0894-6507 | - |
| dc.identifier.uri | http://scholars.ntou.edu.tw/handle/123456789/8566 | - |
| dc.relation.ispartof | Ieee Transactions on Semiconductor Manufacturing | en_US |
| dc.title | Modeling, analysis, simulation, scheduling, and control of semiconductor manufacturing systems: A Petri net approach | en_US |
| dc.type | journal article | en_US |
| dc.identifier.doi | 10.1109/66.705370 | - |
| dc.identifier.doi | <Go to ISI>://WOS:000075140600002 | - |
| dc.identifier.url | <Go to ISI>://WOS:000075140600002 | |
| dc.relation.journalvolume | 11 | en_US |
| dc.relation.journalissue | 3 | en_US |
| item.cerifentitytype | Publications | - |
| item.openairetype | journal article | - |
| item.openairecristype | http://purl.org/coar/resource_type/c_6501 | - |
| item.fulltext | no fulltext | - |
| item.grantfulltext | none | - |
| crisitem.author.dept | College of Electrical Engineering and Computer Science | - |
| crisitem.author.dept | Department of Electrical Engineering | - |
| crisitem.author.dept | National Taiwan Ocean University,NTOU | - |
| crisitem.author.parentorg | National Taiwan Ocean University,NTOU | - |
| crisitem.author.parentorg | College of Electrical Engineering and Computer Science | - |
| Appears in Collections: | 電機工程學系 | |
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