Design and Fabrication of the Metallic Nano-Periodic Structure Substrate for SERS and SPR System

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Project title

Code/計畫編號

NSC100-2221-E019-020

Translated Name/計畫中文名

可同時應用於表面增強拉曼散射及表面電漿子共振系統之金屬奈米週期性結構基板設計與製作

Project Coordinator/計畫主持人

Shu-Sheng Lee

Funding Organization/主管機關

National Science and Technology Council

Department/Unit

Department of Systems Engineering and Naval Architecture

Website

https://www.grb.gov.tw/search/planDetail?id=2336325

Year

2011

Start date/計畫起

01-08-2011

Expected Completion/計畫迄

01-07-2012

Bugetid/研究經費

540千元

ResearchField/研究領域

醫學工程

"人類文明、科技發展及醫藥技術日新月異，人類的壽命延長許多，此意味著身體許多的機能逐漸的退化，許多的疾病也隨之而來，會需要經常至醫療院所進行身體健康狀況的檢測，了解健康狀況變化達到即時醫療、維護健康之目的，因此生物晶片檢測仍是各國致力研究的課題。有鑑於此，本計劃針對目前應用生化反應量測的高靈敏度生物晶片光學感測技術-表面增強拉曼散儀(Surface Enhanced Raman Scattering, SERS)及表面電漿子共振儀(Surface Plasmon Resonance, SPR)開發其晶片基板，使其同時適用於兩種的感測技術，可交叉比對其量測結果而增加樣本量測的準確性。因此本計劃將設計以金屬為材料之奈米週期性結構基板，同時符合表面增強拉曼散之週期結構需求及表面電漿共振的週期性光柵需求，並配合多層膜之設計，使晶片以長距表面電漿共振之量測。計畫中將對不同之基板材料厚度、結構形狀、排列、金屬膜層及入射光源進行奈米週期性結構基板模擬，選擇出最佳的設計進行基板製作，之後以AFM、SEM 拍攝晶片表面奈米金屬結構的實際狀況，並於拉曼散射儀及表面電漿共振儀量測進行生化樣本量測，以測試驗證本計畫所開發的基板功能，達成應用於高靈敏度光電檢測系統的生化樣本反應量測晶片。" "The average age of human extends a lot because of the civilization, technology development and medical improvement. However, this also means that we need more methods for detecting the function aging of organs, metabolism, and old diseases. It’s important to monitor the body condition to be aware of the sign of some disease and we can do some proper treatments immediately. Therefore, the bio-chip detection is still a significant research topic in every country. The purpose of this project is to develop a biochip substrate which is suitable for both surface enhanced Raman scattering (SERS) and surface plasmon resonance(SPR) technology since they are high sensitivity and highly used optical sensing technology in chemical biochemical reaction detection. Our chip substrate will have the ability to get measurement results from SPR and SERS at the same time so that it possible to cross check the results and enhance the accuracy of the detection. We will design metallic periodic nano-structure according to demanding of periodic structure for SERS and grating for SPR. This periodic structure in the substrate can enhance the SERS signals and increase the surface plasmon effect. Also, we will introduce the thin film multilayer into the substrate for the long range SPR measurement. The simulation of the periodic structure with different thickness, shape, arrangement, metal film and incident light source will be done, and then choose the best parameters to fabricate our substrate structure. The AFM and SEM will be used to check the metallic nano-structure on our substrate, and SERS and SPR will be adopted to measure the biochemical sample for testing our substrate efficiency. Finally, a chip for bio-reaction diction with high sensitivity optical electrical measurement system will be carried out and have the potential to further bio-medical detection."

Keyword(s)

表面電漿子共振
表面增強拉曼散儀
金屬奈米圓環孔洞結構
TM穿透光譜系統
surface Plasmon resonance(SPR)
surface-enhanced Raman scattering(SERS)
metallic nano-annular aperture structure
TM transverse spectrum measurement system

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Design and Fabrication of the Metallic Nano-Periodic Structure Substrate for SERS and SPR System

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