Study on Near-Infrared Broadband Multilayered 3d Metamaterials

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Project title

Code/計畫編號

MOST105-2221-E492-020

Translated Name/計畫中文名

近紅外寬頻多層式三維超穎材料之研究

Funding Organization/主管機關

National Science and Technology Council

Co-Investigator(s)/共同執行人

陳哲勤(計畫主持人)

Department/Unit

Taiwan Instrument Research Institute, TIRI

Website

https://www.grb.gov.tw/search/planDetail?id=11891613

Year

2016

Start date/計畫起

01-08-2016

Expected Completion/計畫迄

31-07-2017

Co-Investigator(s)

Hai-Pang Chiang

Bugetid/研究經費

741千元

ResearchField/研究領域

光電工程

"本計畫為二年期研究計畫，主要內容為利用金屬應力自組法，製作100 THz 三維超穎材料，並設計多層具應力之金屬薄膜製作雙層三維超穎材料，最後透過光譜量測及數值模擬分析，研究電磁波與元件交互作用所顯現之光學特性。整個計畫包含二個研究主題: 1. 100 THz 雙層三維化超穎材料: 本主題旨在突破三維化元件技術，我們先前發展之製程技術可製作出共振頻率約為30THz 之三維裂環共振器，故本研究第一年將著重於精進微小化製程技術，以線寬小於60 奈米的二維圖形，搭配適當的薄膜鍍製以控制應力，製作共振頻率100 THz 之三維裂環共振器。此外，再搭配多層應力之金屬層與犧牲層及矽深蝕刻技術，更可形成雙三維裂環共振器於一個二維位元內，以達到多功能之應用目的。 2. 元件量測模擬與耦合效應探討: 在單層元件方面，主要探討其基礎的電磁響應；而在雙層化元件方面，預期可能會出現光譜疊加之情形，若能設計不同應力之雙層金屬，製作出不同尺寸之三維裂環共振器，應可獲得具寬頻響應之超穎材料。此外，由於雙裂環共振器之距離將小於100 奈米(取決於犧牲層厚度)，故改變犧牲層厚度，亦可探討雙裂環間的耦合共振情形如對稱耦合共振(symmetrically coupled resonance)、不對稱耦合共振 (asymmetrically coupled resonance)或類EIT 現象(Electromagnetic Induced Transparency-like phenomena) 等。" "In this two-year project, the 100 THz three dimensional split ring resonators (3D SRRs) will be fabricated by metal-stress-driven assembly method. By depositing stressed-metal multilayers, the double 3D SRRs with complex optical responses could be accomplished. The interactions between electromagnetic wave and these 3D metamaterials will be investigated by both spectrum experiments and numerical simulations. There are two research topics in this project: Ⅰ. 100 THz double layered 3D metamaterials In our previous results, we developed the metal-stress-driven assembly method to fabricate 30 THz 3D SRRs. The first year of this project, we will focus on the 3D miniaturization technique. The 2D template with linewidth less than 60 nm will be patterned through lift-off process. The appropriate intrinsic-stress developed inside the metals films will be examined by depositing different combinations of metal films to form the 3D structures with resonance frequency up to 100 THz. In addition, by depositing stressed-metal multilayers and sacrificial layer and utilizing deep etching technique, the double 3D SRRs within 2D unit cell design could be achieved and exhibiting multi-functional optical properties. Ⅱ. Characterization of optical properties and coupling effects For single layer 3D SRRs, we will focus on the fundamental electromagnetic responses. For double 3D SRRs, the superposition of spectra could be expected. By varying the stressed-metal multilayers, different sized 3D SRRs of double layer metamaterials showing broadband response might be realized. Furthermore, since the distance between double layer SRRs will be less than 100 nm depending on the thickness of sacrificial layer, the coupling effects between the SRRs such as symmetrically coupled resonance, asymmetrically coupled resonance, Electromagnetic Induced Transparency-like phenomena will be discussed as well."

Keyword(s)

超穎材料
裂環共振器
紅外波段
寬頻段
Metamaterials
Split Ring Resonators
Near-Infrared
Broadband

DSpace CRIS

Study on Near-Infrared Broadband Multilayered 3d Metamaterials

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