http://scholars.ntou.edu.tw/handle/123456789/1806| Title: | Fabrication of phase-change Ge2Sb2Te5 nano-rings | Authors: | Cheng Hung Chu Ming Lun Tseng Chiun Da Shiue Shuan Wei Chen Hai-Pang Chiang Masud Mansuripur Din Ping Tsai |
Issue Date: | 20-Jun-2011 | Publisher: | Optical Society of America | Journal Volume: | 19 | Journal Issue: | 13 | Start page/Pages: | 12652-12657 | Source: | Optics Express | Abstract: | Phase-change material Ge2Sb2T5 rings with nanometer-scale thickness have been fabricated using the photo-thermal effect of a focused laser beam followed by differential chemical etching. Laser irradiation conditions and etching process parameters are varied to control the geometric characteristics of the rings. We demonstrate the possibility of arranging the rings in specific geometric patterns, and also their release from the original substrate. |
URI: | http://scholars.ntou.edu.tw/handle/123456789/1806 | ISSN: | 1094-4087 | DOI: | 10.1364/oe.19.012652 |
| Appears in Collections: | 光電與材料科技學系 |
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