http://scholars.ntou.edu.tw/handle/123456789/1848
標題: | Reusable TiN Substrate for Surface Plasmon Resonance Heterodyne Phase Interrogation Sensor | 作者: | Ru-Jing Sun Hung Ji Huang Chien-Nan Hsiao Yu-Wei Lin Bo-Huei Liao Yuan-Fong Chou Chau Hai-Pang Chiang Hai-Pang Chiang |
關鍵字: | refractive index;glucose solution;charge carrier density;surface plasmon resonance;heterodyne phase interrogation;sensitivities;long-term durability;TiN layer | 公開日期: | 6-七月-2020 | 卷: | 10 | 期: | 7 | 起(迄)頁: | 1325 | 來源出版物: | Nanomaterials | 摘要: | A TiN-based substrate with high reusability presented high-sensitivity refractive index measurements in a home-built surface plasmon resonance (SPR) heterodyne phase interrogation system. TiN layers with and without additional inclined-deposited TiN (i-TiN) layers on glass substrates reached high bulk charge carrier densities of 1.28 × 1022 and 1.91 × 1022 cm−3, respectively. The additional 1.4 nm i-TiN layer of the nanorod array presented a detection limit of 6.1 × 10−7 RIU and was higher than that of the 46 nm TiN layer at 1.2 × 10−6 RIU when measuring the refractive index of a glucose solution. Furthermore, the long-term durability of the TiN-based substrate demonstrated by multiple processing experiments presented a high potential for various practical sensing applications. |
URI: | http://scholars.ntou.edu.tw/handle/123456789/1848 | DOI: | 10.3390/nano10071325 |
顯示於: | 光電與材料科技學系 |
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