Self-limiting growth of ZnO films on (0001) sapphire substrates by atomic layer deposition at low temperatures using diethyl-zinc and nitrous oxide

Please use this identifier to cite or link to this item: http://scholars.ntou.edu.tw/handle/123456789/2045

Title:	Self-limiting growth of ZnO films on (0001) sapphire substrates by atomic layer deposition at low temperatures using diethyl-zinc and nitrous oxide
Authors:	Lin, Y. T. Chung, P. H. Lai, H. W. Su, H. L. Lyu, D. Y. Yen, K. Y. Tai-Yuan Lin Kung, C. Y. Gong, J. R.
Issue Date:	Nov-2009
Journal Volume:	256
Journal Issue:	3
Source:	Applied Surface Science
URI:	http://scholars.ntou.edu.tw/handle/123456789/2045
ISSN:	0169-4332
DOI:	10.1016/j.apsusc.2009.08.067 ://WOS:000271757300040
Appears in Collections:	光電與材料科技學系

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