Growth and characterization of ZnO films on (11-20) sapphire substrates by atomic layer deposition using DEZn and N2O

Please use this identifier to cite or link to this item: http://scholars.ntou.edu.tw/handle/123456789/2096

Title:	Growth and characterization of ZnO films on (11-20) sapphire substrates by atomic layer deposition using DEZn and N2O
Authors:	Yen, K. Y. Liu, K. P. Gong, J. R. Tsai, K. Y. Lyu, D. Y. Tai-Yuan Lin Ni, G. Y. Jih, F. W.
Issue Date:	Dec-2009
Journal Volume:	20
Journal Issue:	12
Source:	Journal of Materials Science-Materials in Electronics
URI:	http://scholars.ntou.edu.tw/handle/123456789/2096
ISSN:	0957-4522
DOI:	10.1007/s10854-009-9861-z ://WOS:000270780500018
Appears in Collections:	光電與材料科技學系

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