Computational study of variations in gap size for the electrostatic levitating force of MEMS device using dual BEM

Please use this identifier to cite or link to this item: http://scholars.ntou.edu.tw/handle/123456789/2481

Title:	Computational study of variations in gap size for the electrostatic levitating force of MEMS device using dual BEM
Authors:	Chyuan, S. W. Liao, Y. S. Jeng-Tzong Chen
Issue Date:	Sep-2004
Journal Volume:	35
Journal Issue:	9
Source:	Microelectronics Journal
URI:	http://scholars.ntou.edu.tw/handle/123456789/2481
ISSN:	0026-2692
DOI:	10.1016/j.mejo.2004.06.005 ://WOS:000223676800008
Appears in Collections:	河海工程學系

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