Numerical studies of variations in the gap and finger width ratio and travelled distance for the driving force of a radio-frequency microelectromechanical system device using the dual boundary element method

Please use this identifier to cite or link to this item: http://scholars.ntou.edu.tw/handle/123456789/2520

Title:	Numerical studies of variations in the gap and finger width ratio and travelled distance for the driving force of a radio-frequency microelectromechanical system device using the dual boundary element method
Authors:	Liao, Y. S. Chyuan, S. W. Jeng-Tzong Chen
Issue Date:	Oct-2004
Journal Volume:	218
Journal Issue:	10
Source:	Proceedings of the Institution of Mechanical Engineers Part C-Journal of Mechanical Engineering Science
URI:	http://scholars.ntou.edu.tw/handle/123456789/2520
ISSN:	0954-4062
DOI:	10.1243/0954406042368982 ://WOS:000225359400014
Appears in Collections:	河海工程學系

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