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請用此 Handle URI 來引用此文件: http://scholars.ntou.edu.tw/handle/123456789/25423
標題: Study of a highly sensitive ammonia gas sensor based on a sputtered Ga-doped SnO 2 (GTO) thin film decorated with evaporated platinum nanoparticles
作者: Kuo, Chi-Kang
Luo, Kai -Hong
Chu, Pai-Yi
Wang, Jung-Chuan
Tan, Shih-Wei 
Liu, Wen- Chau
關鍵字: Ga-doped SnO 2;GTO;Pt NP;NH 3 gas sensor;Sensing response
公開日期: 2024
出版社: ELSEVIER SCIENCE SA
卷: 417
來源出版物: SENSORS AND ACTUATORS B-CHEMICAL
摘要: 
An interesting ammonia (NH 3 ) gas sensor manufactured by the integration of a sputtered Ga-doped SnO 2 (GTO) thin film combined with evaporated platinum nanoparticles (Pt NPs) deposited on a sapphire substrate. The incorporation of Pt NPs is found to significantly enhance the sensor ' s performance in detecting NH 3 gas. Through a series of analyses, the sensor ' s fundamental compositional, elemental, and structural characteristics are meticulously examined, providing insight into its superior sensing capabilities. In this research, the steady -state current-voltage (I -V) and transient current-time (I -t) characteristics are meticulously quantified to investigate the relevant properties of NH 3 gas sensing thoroughly. Experimental, upon exposure to an atmosphere containing 1000 ppm NH 3 /air gas, the sensor demonstrates an exceptional sensing response of 5980, along with a response and recovery times of 115 seconds and 30 seconds, respectively, at an operational temperature of 275 degrees C. In addition, a lower NH 3 gas content of 0.1 ppm can be authentically detected for the produced sensor. The proposed sensor shows good sensing reproducibility toward NH 3 gas. An analytical examination of NH 3 molecule adsorption on the sensor ' s surface has been conducted to elucidate the phenomena associated with surface coverage. In addition to the advantages indicated above, the studied Pt NP/GTO-based sensor also exhibits a simple structure, easy fabrication, widespread detection ranging from 0.1 to 1000 ppm NH 3 in air, and costeffectiveness.
URI: http://scholars.ntou.edu.tw/handle/123456789/25423
DOI: 10.1016/j.snb.2024.136043
顯示於:電機工程學系

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