Annealing of sputter-deposited nanocrystalline Cr-Ta coatings in a low-oxygen-containing atmosphere

Please use this identifier to cite or link to this item: http://scholars.ntou.edu.tw/handle/123456789/2601

Title:	Annealing of sputter-deposited nanocrystalline Cr-Ta coatings in a low-oxygen-containing atmosphere
Authors:	Chang, L. C. Yung-I Chen Kao, H. L.
Issue Date:	Sep-2012
Journal Volume:	520
Journal Issue:	23
Source:	Thin Solid Films
URI:	http://scholars.ntou.edu.tw/handle/123456789/2601
ISSN:	0040-6090
DOI:	10.1016/j.tsf.2012.07.048 ://WOS:000308207000018
Appears in Collections:	光電與材料科技學系

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