Chemical inertness of Ta-Si-N coatings in glass molding

Please use this identifier to cite or link to this item: http://scholars.ntou.edu.tw/handle/123456789/2617

Title:	Chemical inertness of Ta-Si-N coatings in glass molding
Authors:	Yung-I Chen Cheng, Y. R. Chang, L. C. Lu, T. S.
Issue Date:	Jun-2015
Journal Volume:	584
Source:	Thin Solid Films
URI:	http://scholars.ntou.edu.tw/handle/123456789/2617
ISSN:	0040-6090
DOI:	10.1016/j.tsf.2014.12.040 ://WOS:000353813100013
Appears in Collections:	光電與材料科技學系

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