Incident-Angle-Dependent Reflectance in Distributed Bragg Reflectors Fabricated from ZnO/MgO Multilayer Films

Abstract

We present the incident-angle-dependent reflectance spectra of the 10-period ZnO/MgO multilayer films deposited on Si by sputtering technique. As increasing the incident angle, the resonant wavelength and bandwidth of the measured reflectance spectra exhibit redshift and narrower, respectively. The theoretical curves using transfer matrix method taken account of transverse electric (TE) and transverse magnetic (TM) polarizations are calculated to well describe the variations in the behavior of the experimental spectra. The simulated TE- and TM-reflection band at different angles can evaluate the bandwidth of the resonance band and provide valuable parameters to design an omnidirectional-reflection band in selected multilayer structure.