http://scholars.ntou.edu.tw/handle/123456789/8142| Title: | Characterization of RuO2 thin films deposited on Si by metal-organic chemical vapor deposition | Authors: | Liao, P. C. Mar, S. Y. Ho, W. S. Huang, Y. S. Kwong-Kau Tiong |
Issue Date: | Oct-1996 | Journal Volume: | 287 | Journal Issue: | 1-2 | Source: | Thin Solid Films | URI: | http://scholars.ntou.edu.tw/handle/123456789/8142 | ISSN: | 0040-6090 | DOI: | 10.1016/s0040-6090(96)08761-5 |
| Appears in Collections: | 電機工程學系 |
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