http://scholars.ntou.edu.tw/handle/123456789/8155| Title: | MODELING OF THE FORMATION OF RUO2 THIN-FILM FROM RU(C5H5)(2) BY METAL-ORGANIC CHEMICAL-VAPOR DECOMPOSITION | Authors: | Mar, S. Y. Huang, Y. S. Kwong-Kau Tiong |
Issue Date: | Mar-1995 | Journal Volume: | 258 | Journal Issue: | 1-2 | Source: | Thin Solid Films | URI: | http://scholars.ntou.edu.tw/handle/123456789/8155 | ISSN: | 0040-6090 | DOI: | 10.1016/0040-6090(94)06368-0 |
| Appears in Collections: | 電機工程學系 |
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