http://scholars.ntou.edu.tw/handle/123456789/8541| Title: | Special Section on Semiconductor Manufacturing Systems: Modeling, Analysis, and Control | Authors: | Mu-Der Jeng Xie, X. |
Issue Date: | Oct-2001 | Journal Volume: | 17 | Journal Issue: | 5 | Source: | Ieee Transactions on Robotics and Automation | URI: | http://scholars.ntou.edu.tw/handle/123456789/8541 | ISSN: | 1042-296X | DOI: |
| Appears in Collections: | 電機工程學系 |
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