http://scholars.ntou.edu.tw/handle/123456789/23865| Title: | Combined Diamond Disks in Chemical Mechanical Polishing | Authors: | Ming Yi Tsai Jihng Kuo Ho Jyu Lin Zeng |
Issue Date: | 2015 | Journal Volume: | 642 | Start page/Pages: | 110-114 | Source: | Key Engineering Materials | URI: | http://scholars.ntou.edu.tw/handle/123456789/23865 |
| Appears in Collections: | 機械與機電工程學系 |
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