Mechanical properties and oxidation behavior of ZrNx thin films fabricated through high-power impulse magnetron sputtering deposition

Please use this identifier to cite or link to this item: http://scholars.ntou.edu.tw/handle/123456789/2600

Title:	Mechanical properties and oxidation behavior of ZrNx thin films fabricated through high-power impulse magnetron sputtering deposition
Authors:	Chang, L. C. Chang, C. Y. Yung-I Chen Kao, H. L.
Issue Date:	Mar-2016
Journal Volume:	34
Journal Issue:	2
Source:	Journal of Vacuum Science & Technology A
URI:	http://scholars.ntou.edu.tw/handle/123456789/2600
ISSN:	0734-2101
DOI:	10.1116/1.4941070 ://WOS:000372352300007
Appears in Collections:	光電與材料科技學系

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