Characterization of Ta-Si-N coatings prepared using direct current magnetron co-sputtering

Please use this identifier to cite or link to this item: http://scholars.ntou.edu.tw/handle/123456789/2630

Title:	Characterization of Ta-Si-N coatings prepared using direct current magnetron co-sputtering
Authors:	Yung-I Chen Lin, K. Y. Wang, H. H. Cheng, Y. R.
Issue Date:	Jun-2014
Journal Volume:	305
Source:	Applied Surface Science
URI:	http://scholars.ntou.edu.tw/handle/123456789/2630
ISSN:	0169-4332
DOI:	10.1016/j.apsusc.2014.04.011 ://WOS:000336525400112
Appears in Collections:	光電與材料科技學系

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